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会上,董事长简述了百思个人生长的畴昔和将来,并为与会职员描画了百思宏伟蓝图及夸姣的远景与将来,极年夜的奋发和鼓舞了员工士气;并请求全部员工“顺时势、树典范、明思路、分步调、理关系”,相互共同、主动主动地展开事情,为个人接上去的各项事情有序展开打下坚固的根本。
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等离子体加强反转展转PECVD体系 BTF-1200C-R-PECVD/Plasma enhanced rotational PECVD system
首要特性Main features:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
我司研制的反转展转PECVD体系能使全部尝试腔体都处于辉光产生区,辉光均匀等效,这类技术很好的处理了传统等离子事情不不变状况,如许离子化的范围和强度是传统PECVD的百倍,并处理了物料不均匀聚积征象
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
该款装备选用特别形状(两端细中间粗)的石英管作为化学气相堆积的反应室;加热的同时炉管可360度扭转,管内壁有石英挡片帮忙粉体质料翻炒有助于烧结得更均匀;并且炉体可摆布年夜角度倾斜,便利收支料,倾斜角度在0~35°可调。
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
此款装备现遍及利用于低温石墨烯制备尝试、粉体质料碳包覆尝试。
技术参数Technical Parameters
Furnace加热炉 |
|
Max. Tem最低温度 |
1200℃ |
Heating zone length加热区长度 |
440mm |
Constant zone length恒温区长度 |
200mm |
控温体例 |
lPID automatic control and auto-tune function. 恍惚PID节制和自整定调度 l30 programmable segments for precise thermal processing. 智能化30段可编程节制 lBuilt-in protection for the over-heated and broken thermocouple. 超暖和断偶报警服从 lOperation interface is 7 "industrial control computer 操纵界面为7”工控电脑 |
Heating Elements 加热元件 |
·Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝(掺钼铁铬铝合金) |
Temperature Accuracy 控温精度 |
+/- 1℃ |
Processing tube 炉管 |
Size:Φ60*420+Φ100*360+Φ60*420mm 尺寸:Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate:3~13r/min 炉管转速:3~13r/min |
Furnace body inclination angle |
0~35°(adjustable) |
PE source PE源 |
|
Signal frequency旌旗灯号频次 |
13.56 MHz±0.005% |
Power output range功率输入范围 |
0-500W |
RF output interface射频输入接口 |
50 Ω, N-type, female |
Power stability功率不变性 |
≤5W |
Gas supply system气路体系 |
|
High precision mass Flowmeter(Range optional) |
高精度质量流量计(量程可选) |
Accuracy精确度 |
±1.5% |
Response accuracy呼应精度
|
·±0.2% |
Response time呼应时候
|
Gas characteristics:1~4sec 气特性 Electrical characteristics:10sec 电特性 |
Working pressure difference range事情压差范围
|
0.1~0.5MPa |
Max. pressure最年夜压力
|
·3MPa |
Connection 连讨论范例
|
Φ6mmDouble clasp stainless steel joint Φ6mm双卡套不锈钢讨论
|
Vacuum unit真空体系 |
|
KF25 series bellows and manual stopper valves |
采取KF25系列波纹管和手动挡板阀 |
Vacuum up to10-1Pa |
真空度可达10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester |
数显真空测试仪可直观的显现数值 |