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小型反转展转PECVD体系BTF-1200C-R-S-PECVD/Small rotary type PECVD
首要特性Main features
该装备炉管可360度扭转,管内壁有石英挡片帮忙粉料翻转有助于烧结得更均匀;
The tube of the equipment can be rotated 360 degrees, and the quartz baffle on the inner wall of the tube helps the powder to be turned over to help the sintering to be more uniform;
可摆布年夜角度倾斜,便利出放料,倾斜角度在0~35°之间;
It can be tilted from left to right at a large angle to facilitate the discharge. The tilt angle is between 0~35°.
该款装备是全主动Plasma加强CVD体系(PECVD),持续可控温度和Plasma强度等,装备真空体系,可以实现高压前提下的尝试,针对低温石墨烯、碳纳米管生长等。PECVD体系能使全部尝试腔体都处于辉光产生区,辉光均匀等效,这类技术很好的处理了传统等离子事情不不变状况,如许离子化的范围和强度是传统PECVD的百倍,并处理了物料不均匀聚积征象;
The device is a fully automated Plasma Enhanced CVD System (PECVD),can achieve continuous sliding temperature zones and to continuously control the temperature and plasma intensity.Equipped with vacuum unit,can realize experiments under low pressure conditions, such as low temperature graphene and carbon nanotube growth. PECVD system enables the entire experimental cavity to be in the glow generation area, and the glow is evenly equivalent. This technique solves the unstable state of the traditional plasma operation, so the range and intensity of ionization. It is a hundred times more than traditional PECVD and solves the problem of uneven material accumulation.
本款装备可以做金属复合石墨烯质料,是目前最高端的金属复合质料制备装备。
Used for prepare metal composite graphene material,is the most high-end preparation equipment for metal composite material
技术参数Technical Parameters
Furnace加热炉 |
|
Max. Temp |
1100℃ |
Temperature Controller 控温体例 |
lPID automatic control and auto-tune function. 恍惚PID节制和自整定调度 l30 programmable segments for precise thermal processing. 智能化30段可编程节制 lBuilt-in protection for the over-heated and broken thermocouple. 超暖和断偶报警服从 l10" LCD touch screen and industrial instrumentation dual temperature control 10"液晶触屏与工控仪表两重控温 |
Heating Elements 加热元件 |
·Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝(掺钼铁铬铝合金) |
Temperature Accuracy 控温精度 |
+/- 1℃ |
Processing tube 炉管 |
·Size:Φ25*800(middle sizeΦ50*225) 尺寸:Φ25*800(中间部位尺寸Φ50*225) Furnace tube rotation rate:3~13r/min 炉管转速:3~13r/min |
Furnace body inclination angle |
0~35°(adjustable) |
PE source PE源 |
|
Signal frequency旌旗灯号频次 |
13.56 MHz±0.005% |
Power output range功率输入范围 |
0-150W |
RF output interface射频输入接口 |
50 Ω, N-type, female |
Power stability功率不变性 |
≤5W |
Gas supply system气路体系 |
|
High precision mass Flowmeter(Range optional) |
高精度质量流量计(量程可选) |
Accuracy精确度 |
±1.5% |
Response accuracy呼应精度 |
·±0.2% |
Response time呼应时候 |
Gas characteristics:1~4sec 气特性 Electrical characteristics:10sec 电特性 |
Working pressure difference range事情压差范围 |
0.1~0.5MPa |
Max. pressure最年夜压力 |
3MPa |
Connection 连讨论范例 |
Φ6mmDouble clasp stainless steel joint Φ6mm双卡套不锈钢讨论 |
Vacuum unit真空体系 |
|
KF25 series bellows and manual stopper valves |
采取KF25系列波纹管和手动挡板阀 |
Vacuum up to10-1Pa |
真空度可达10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester |
数显真空测试仪可直观的显现数值 |